Product Details
Flow sensors / controllers
Compact Flow Rate Sensor RAPIFLOW?
- Model No.
- FSM3
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With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
- Industry
- Shield gas
- Semiconductor manufacturing process (post-process)
- N2 purging related products

- Documents / Download
PDF Catalog
Safety Precautions
User's Manual
Software
2D CAD
3D CAD
Technical Data
12BetÓéÀÖAPP plus Members Only
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Added IP65 protection structure that can be used safely even if water is utilized in the environment with dust, during maintenance and cleaning.
As an option, the European Explosion-Proof Directive (ATEX) compliant type is also available.

¡¾Stainless Steel Body¡¿
NEW : Flow rate range: expanded to 1000?.
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Two types of fittings and screw-in types can be selected: JXR fittings, double barbed fitting.
The integrated needle type further contributes to space savings.

¡¾Resin Body¡¿
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Models dedicated to oxygen are also available (oil prohibited).
Four fittings can be selected: push-in elbow and straight fittings, screw-in elbow and straight fittings.
2-port valves can be connected directly, contributing to further space savings.
The integrated needle type further contributes to space savings.

¡¾High Precision/High Responsivity¡¿
By the redesigning of the circuitry, a reduction of up to 50% in pressure loss has been achieved compared with conventional products.
The flow direction can be arbitrarily set from 3 directions, forward, bidirectional and reverse.
Response time: 50msec.

¡¾IO-Link will Automate your Entire Factory¡¿
With compatibility to IO-Link, the transmission of the parameters and event data will make Preventative Maintenance possible.
Ideal for leak inspection and air consumption control.

¡¾Start the sample kit lend in Japan¡¿
You can check the flow rate range before purchase.

Model No. | Product name | Remarks |
---|---|---|
FSM3-L | Liquid crystal display | |
FSM3-B | Bar display | |
FSM3-C | IO-Link type | |
¹ó³§²Ñ3-³¢¡ù4/5 | Liquid crystal display | Environment-resistant specifications |
¹ó³§²Ñ3-µþ¡ù4/5 | Bar display | Environment-resistant specifications |
FSM2-D | Separated display |
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