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Product Details

Flow sensors / controllers

Compact Flow Rate Sensor RAPIFLOW?

Model No.
FSM3

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With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.

Industry
  • Shield gas
  • Semiconductor manufacturing process (post-process)
  • N2 purging related products
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  • Features
  • Variations

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Added IP65 protection structure that can be used safely even if water is utilized in the environment with dust, during maintenance and cleaning.
As an option, the European Explosion-Proof Directive (ATEX) compliant type is also available.

¡¾Stainless Steel Body¡¿
NEW : Flow rate range: expanded to 1000?.
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Two types of fittings and screw-in types can be selected: JXR fittings, double barbed fitting.
The integrated needle type further contributes to space savings.

¡¾Resin Body¡¿
With just this 1 device, 5 types of gases are compatible: air, nitrogen, argon, carbon dioxide gas and mixed gases.
Models dedicated to oxygen are also available (oil prohibited).
Four fittings can be selected: push-in elbow and straight fittings, screw-in elbow and straight fittings.
2-port valves can be connected directly, contributing to further space savings.
The integrated needle type further contributes to space savings.

¡¾High Precision/High Responsivity¡¿
By the redesigning of the circuitry, a reduction of up to 50% in pressure loss has been achieved compared with conventional products.
The flow direction can be arbitrarily set from 3 directions, forward, bidirectional and reverse.
Response time: 50msec.

¡¾IO-Link will Automate your Entire Factory¡¿
With compatibility to IO-Link, the transmission of the parameters and event data will make Preventative Maintenance possible.
Ideal for leak inspection and air consumption control.

¡¾Start the sample kit lend in Japan¡¿
You can check the flow rate range before purchase.

Model No. Product name Remarks
FSM3-LLiquid crystal display
FSM3-BBar display
FSM3-CIO-Link type
¹ó³§²Ñ3-³¢¡ù4/5Liquid crystal displayEnvironment-resistant specifications
¹ó³§²Ñ3-µþ¡ù4/5Bar displayEnvironment-resistant specifications
FSM2-DSeparated display

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